Aviza's Pantheon system is a multi-chamber single wafer cluster tool configurable to both 200mm and 300mm wafer sizes designed to meet process and productivity requirements of today and beyond the 90-nanometer node. The Pantheon system is designed to offer precise atomic-level thickness control, low process temperature and highly conformal coatings with excellent film quality for a wide range of films, including aluminum oxide (Al2O3), hafnium oxide (HfO2), titanium oxide (TiO2), hafnium silicate (HfSiOx) and titanium nitride (TiN).

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