Mercury XLS 200 is an i-line reduction system with a minimum resolution of 0.35 microns, providing a high resolution i-line reduction stepper option for selected semiconductor markets.

Veeco Instruments Inc. a global leader of advanced thin film etch and deposition process equipment, acquired Ultratech, Inc. a leading supplier of lithography, laser-processing and inspection systems used to manufacture semiconductor devices and LEDs.


VEECO / ULTRATECH

XLS 200	

The Mercury XLS 248 is a DUV (248nm) reduction stepper providing a minimum resolution of 0.25 microns for selected semiconductor applications requiring sub-0.35 micron resolution.

248nm DUV Stepper

概要（Overview）

サービス

248nm DUV Stepper のメーカー

248nm DUV Stepper のトップ製品

XLS 200

XLS 248