CG5000 is designed to meet the needs for higher accuracy and versatility in development and manufacturing processes of new generation semiconductor devices. Hitachi High-Tech achieved new records*2 for throughput and metrology accuracy repeatability with the CG5000 by redesigning the transfer system and employing improved electron optics and image processing technologies.  

Hitachi High-Tech offers a range of advanced industrial equipment solutions for assembly and processing machines used in the production of lithium batteries, auto parts and advanced film. Also offered R&D equipment necessary for the development of FC, organic materials, and catalyst materials.

HITACHI

CG5000

SEM - Critical Dimension (CD) Measurement

CG5000

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