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説明
Atomic Force Microscope (AFM) Dry pumps not included構成
【Wide-Area AFM main body】 (1) AFM unit AFM sensor Cantilever holder (2) Stage unit and accessories XYZ (3-axis) stage Anti-vibration table 300 mm chuck (3) Optical microscope Optical microscope Drive (zoom/focus) CCD camera (4) Control unit and data processing unit Data processing PC CRT display Controller Control unit power supply enclosure (5) Remote probe replacing/optical axis 1 set remote-adjusting unit (6) Device Enclosure Enclosure Filter unit Exhaust box Signal tower Ionizer Power receiving box 【FOUP Transfer Unit】 (1) FOUP 1 (2) Transfer robot 1 (3) Aligner 1 (4) Controller 1 (5) Filter unit 1 【Accessories】 (1) Cantilevers Fine mode cantilever 1 Wide mode cantilever 1 High aspect cantilever 1 (2) MO disk drive unit 1 【Options】 (1) Load distribution board and fixture 1 set (Excluding floor-anchoring work) Module: Metrology Process: AFMOEMモデルの説明
High-speed In-line AFM System for 45-nm Node LSIs.ドキュメント
HITACHI
WA3300
カテゴリ
AFM
最終検証： 17日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
108722
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2007
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