概要（Overview）

Keysight 5600LS AFM is an Exceptional Application Versatility for Large and Small Samples. The 5600LS utilizes the largest fully addressable and programmable stage on the market, 200mm x 200mm, as well as a low-noise AFM design. Samples up to 8” in diameter and 30mm tall are easily accepted by the 200mm vacuum chuck. The stage accommodates a 300mm wafer with repositioning.