J.A. WOOLLAM

M-2000

VUV-VASE (GEN II)

The RC2® design builds on 25 years of experience. It combines the best features of previous models with innovative new technology: dual rotating compensators, achromatic compensator design, advanced light source and next-generation spectrometer design. The RC2 is a near-universal solution for the diverse applications of spectroscopic ellipsometry.

The theta-SE is a fully integrated spectroscopic ellipsometer designed for efficient and accurate measurement of film thickness and optical properties. With features such as 300 mm sample mapping, a small-spot measurement beam, fast sample alignment, a look-down camera, and the latest Dual-Rotation ellipsometer technology, it provides everything needed for spatial uniformity assessment.

Its high-speed capabilities, including fast point-to-point translation and continuous data collection through Dual-Rotation ellipsometer technology, optimize sample throughput. Despite its powerful features, the theta-SE remains compact, thanks to the patented Dual-Theta rotation stage, allowing full 300 mm mapping in a small, table-top instrument with a footprint just slightly larger than a 300 mm wafer.

User-friendly automation, along with built-in reporting, ensures easy operation with quick access to measurement results. Moreover, the theta-SE offers affordability without compromising on the power of spectroscopic ellipsometry and 300 mm uniformity mapping.

J.A. WOOLLAM

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M-2000

VUV-VASE (GEN II)

RC2

ThetaSE

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