ULTRA DIMENSION 900
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AOI概要（Overview）
Orbotech's Ultra Dimension™ 900 continues the series' revolution of the AOI room workflow, now for the IC substrate market. Designed for ultra fine pattern inspection down to 5μm and superior laser via (LV) inspection accuracy & operational efficiency, the Ultra Dimension 900 leverages field-proven inspection and measurement capabilities to meet the demanding, high precision requirements of automated optical inspection for IC substrate manufacturing.
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