概要（Overview）

PEP 3510C is a dry chemistry downstream processing system manufactured by GaSonics. It is designed for photoresist removal in the fabrication of ICs with feature sizes of 0.25 microns and below. The system incorporates the Company’s proprietary microwave downstream processing technology and has a throughput rate ranging from approximately 45 to 55 wafers per hour, depending upon wafer size and customer application.