説明
ETCH Dry Etching Machine構成
Engraving point; 18 pieces/furnace; maximum 1800W; robot transfer pieceOEMモデルの説明
The Aura 1000 is an advanced dry chemistry processing system for photoresist removal, manufactured by GaSonics. It incorporates the company’s proprietary microwave downstream processing technology and is designed to be used in the fabrication of ICs with feature sizes of 0.25 microns and below. The system provides a lower cost of ownership solution for advanced IC manufacturers and has a throughput rate ranging from approximately 45 to 55 wafers per hour, depending on wafer size and customer application.ドキュメント
ドキュメントなし
LAM RESEARCH / NOVELLUS / GASONICS
A1000
検証済み
カテゴリ
Ashers / Plasma Cleaner
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
66570
ウェーハサイズ：
6"/150mm
ヴィンテージ：
1991
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
LAM RESEARCH / NOVELLUS / GASONICS
A1000
カテゴリ
Ashers / Plasma Cleaner
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
66570
ウェーハサイズ：
6"/150mm
ヴィンテージ：
1991
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
ETCH Dry Etching Machine構成
Engraving point; 18 pieces/furnace; maximum 1800W; robot transfer pieceOEMモデルの説明
The Aura 1000 is an advanced dry chemistry processing system for photoresist removal, manufactured by GaSonics. It incorporates the company’s proprietary microwave downstream processing technology and is designed to be used in the fabrication of ICs with feature sizes of 0.25 microns and below. The system provides a lower cost of ownership solution for advanced IC manufacturers and has a throughput rate ranging from approximately 45 to 55 wafers per hour, depending on wafer size and customer application.ドキュメント
ドキュメントなし