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LAM RESEARCH / NOVELLUS / GASONICS GAMMA EXPRESS
  • LAM RESEARCH / NOVELLUS / GASONICS GAMMA EXPRESS
  • LAM RESEARCH / NOVELLUS / GASONICS GAMMA EXPRESS
  • LAM RESEARCH / NOVELLUS / GASONICS GAMMA EXPRESS
説明
Stripper/Asher
構成
構成なし
OEMモデルの説明
The GAMMA Express, introduced in 2006, is a high productivity resist strip system designed to meet the technology requirements for 45 nanometer manufacturing. GAMMA Express performs high dose implant strip (HDIS) and incorporates non-oxidizing processes for advanced silicides and low-k dielectric films. The redesigned GAMMA Express platform offers a new direct-drive wafer handling subsystem, as well as a new high ash rate source.
ドキュメント

ドキュメントなし

カテゴリ
Ashers / Plasma Cleaner

最終検証: 30日以上前

主なアイテムの詳細

状態:

Used


稼働ステータス:

不明


製品ID:

30953


ウェーハサイズ:

12"/300mm


ヴィンテージ:

不明


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

LAM RESEARCH / NOVELLUS / GASONICS

GAMMA EXPRESS

verified-listing-icon
検証済み
カテゴリ
Ashers / Plasma Cleaner
最終検証: 30日以上前
listing-photo-d3153505e81b497db90ba5d9e78092ea-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
主なアイテムの詳細

状態:

Used


稼働ステータス:

不明


製品ID:

30953


ウェーハサイズ:

12"/300mm


ヴィンテージ:

不明


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Stripper/Asher
構成
構成なし
OEMモデルの説明
The GAMMA Express, introduced in 2006, is a high productivity resist strip system designed to meet the technology requirements for 45 nanometer manufacturing. GAMMA Express performs high dose implant strip (HDIS) and incorporates non-oxidizing processes for advanced silicides and low-k dielectric films. The redesigned GAMMA Express platform offers a new direct-drive wafer handling subsystem, as well as a new high ash rate source.
ドキュメント

ドキュメントなし