概要（Overview）

The System 1 family of ashers and etchers remains a reliable and cost-effective solution for semiconductor IC fabs, optoelectronics, Thin Film Head/Data Storage, and MicroElectro-Mechanical Systems (MEMS) in Silicon, Gallium Arsenide, and Indium Phosphide processing. Handle wafer sizes ranging from 50mm to 150mm round and 4.5" square with ease.