概要（Overview）

"The GS1000 by Hitachi High-Tech is an advanced SEM (Scanning Electron Microscopy) tool designed for large FOV area inspection. It uniquely combines high-speed scanning with a large-current electron beam, ensuring high-resolution imaging of 80um x 80um with exceptional in-image uniformity accuracy of less than 0.02%. The system is adept at correlating multiple processes and analyzing yields by comparing SEM images with design data.