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CS4800
カテゴリ
CD-SEM概要（Overview）
The CS4800 provides high-quality SEM imaging, improved measurement precision, and fast, automated operation, designed to improve productivity and operating efficiency of existing manufacturing lines and increase customer's process control capability. In addition, the CS4800 can be configured to handle two different wafer sizes that can be switched by the customer using to a new wafer-transfer system.
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