概要（Overview）

The Hitachi S-9200 CD SEM "45 (automatic operation)" is a high-precision scanning electron microscope designed for critical dimension (CD) measurements on semiconductor wafers. It supports 6-inch and 8-inch wafer sizes, making it versatile for various production environments. With its automated operation, it ensures consistent and reliable results while reducing human error. The CD SEM utilizes a focused electron beam to capture high-resolution images, enabling detailed analysis of patterns, line widths, and structural characteristics. Equipped with a 5-point measurement system, it allows for accurate and repeatable measurements across the wafer. The S-9200 CD SEM is an essential tool for semiconductor manufacturers, enabling precise CD measurements and optimization of production processes. Its advanced technology and automation capabilities make it an invaluable asset in quality control and process development.