S-9260A
カテゴリ
CD-SEM概要（Overview）
The electron optical system of the Model S-9260 CD-SEM has a 3-nm image resolution, which is applicable to lines/spaces and hole patterns of less than 0.1 µm. Figs. 2 and 3 show examples of observations of the model. It has formula-editor and beam-tilt observation functions that enable detecting process variations early and controlling them easily.
現在の掲載品
3
サービス
検査、保証、鑑定、ロジスティクス
