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説明
説明なし構成
構成なしOEMモデルの説明
The S-9380 is Hitachi’s most advanced CD-measurement SEM developed for 65 nm process control of semiconductor devices on wafers up to 300 mm in diameter. With improvement in both hardware and software, the S-9380 supports a high throughput of 33 wafers per hour with 20 measurement points per wafer, and resolution of 2.0 nm.ドキュメント
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HITACHI
S-9380
カテゴリ
CD-SEM
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
96504
ウェーハサイズ：
不明
ヴィンテージ：
2009
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説明
説明なし構成
構成なしOEMモデルの説明
The S-9380 is Hitachi’s most advanced CD-measurement SEM developed for 65 nm process control of semiconductor devices on wafers up to 300 mm in diameter. With improvement in both hardware and software, the S-9380 supports a high throughput of 33 wafers per hour with 20 measurement points per wafer, and resolution of 2.0 nm.ドキュメント
ドキュメントなし