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CG7300
カテゴリ
CD-SEM概要（Overview）
The CG7300 provides enhanced high-precision measurement and improved throughput performance. The tool is based on a "common platform concept" that has been extended from previous model CG6300. This model is geared toward mass production of 5nm generation devices and development of 3nm generation devices for EUV*2 Lithography.
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