CS200-ma (Multi-Load/Unload Aquarius Cleaner Configuration):
Can function as a standalone CMP polishing system, or as a fully automated Dry in-Dry out system with the integrated Double Sided Post-CMP cleaner
True Bridge tool, can run two different wafer sizes simultaneously

Axus Technology is a global OEM company based in Chandler, Arizona, bringing the latest surface processing solutions to emerging technology industries such as Semiconductor, MEMS, Automotive, Defense and Aerospace, Lifesciences, and IoT. Axus provide advanced CMP tools and technology, along with exceptional technical expertise for polishing, wafer cleaning, precision wafer grind processing, and legacy tools; making us them one of the best highly specialized technology suppliers and consulting services focused on engineering capability and efficiency in supporting the CMP market.

CAPSTONE CS200-ma

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