DFS8910
カテゴリ
CMP概要（Overview）
The DFS8910 is a fully-automatic surface planer for Φ8-inch wafers. It has 1 axis and 1 chuck table. It uses ultrahigh-precision planarization technology with a diamond bit to provide solutions for high-precision planarization of ductile materials such as metals, resins, and their composites as well as solutions for reducing bump height variation and surface roughness.
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