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F-REX300S
カテゴリ
CMP概要（Overview）
The Ebara FREX 300 S is a 300mm CMP system, featuring a four-head, four-platen design with a three-step clean process. It reliably meets 7nm tech requirements, providing development and production flexibility, and best-in-class reliability and cost of ownership.
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検査、保証、鑑定、ロジスティクス
