概要（Overview）

The iSPRAY-300 is a spray coater designed for use with low-viscosity photoresists such as Shipley 1813, AZ 4999, AZ 9260, and TI Spray. The process-optimized spray nozzle generates extremely fine droplets, ensuring uniform coating across the entire substrate surface and a high level of repeatability. The spray coating takes place in a closed process chamber using a loop-shaped spray pattern. The iSPRAY-300 can coat both round and square substrates, up to 8 wafers at a time, with a maximum diameter of 300 mm or for 12 x 12 inch substrates.