説明

Asset Description TRACT TEL ACT 8 Software Version 2.04.000 CIM SECS Process COAT / DEV Excluded Items List (Pumps, Chillers & Abatement are all excluded)

構成

2C4D System Type Description Quantity Main System MAIN BODY 1 Handler System IRA 1 Handler System PRA 2 Factory Interface SMIF 3 Others Options System Handler System ROBOT (CRA) 1

OEMモデルの説明

CLEAN TRACK™ ACT™ 8 is a state-of-the-art Coater/Developer designed for 75-200mm wafers. It offers stable, high-quality processing and enables a smooth transition from R&D to volume production. When used in-line with the exposure tool, the system has a similar footprint to its predecessors, but provides higher throughput due to its faster wafer transfer speed. The uptime has improved due to the increased reliability of components and ease of maintenance. The platform also uses a chemical filter and a high precision oven to support DUV processing. This makes it an ideal choice for those looking for a reliable and efficient Coater/Developer.