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TRIAS

TRIAS TI/TIN

The MB2-730 is a highly reliable system designed for advanced process capability in tungsten and tungsten silicide CVD applications. It has been in production for 5 years and has proven to be a dominant tool in the CVD tungsten silicide market, with a market share of over 70%. This system is known for its reliability and advanced process capabilities, making it a popular choice for those in the industry.

MB2-730

Trias SPA is a 300mm version of plasma nitridation system. The new system can also be used for oxidation processes.

The Trias SPA uses unique Slot Plane Antenna (SPA) plasma, based on the Radial Line Slot Antenna (RLSA) microwave plasma. It produces high-density plasmas at low electron temperatures to enable damage-free processes at temperatures no higher than 400C. By optimizing the slot configuration of the antenna, the plasma distribution can be adjusted to achieve excellent uniformity, which is comparable to those obtained with advanced furnace technology.

CVD (Metalization)

概要（Overview）

サービス

CVD (Metalization) のメーカー

CVD (Metalization) のトップ製品

TRIAS

TRIAS TI/TIN

MB2-730

TRIAS SPA