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CANON APT-5800
    説明
    説明なし
    構成
    Process Atomosphere pressure CVD (BPSG) Wafer Size 200MM Wafer Shape Notch Wafer Cassette 8" Plastic Miraial SMIF Interface NO <1> Enclosure 1. Door 2.Load window 3.Clean unit Spec. ULPA Filter (0.1μm) <2> Wafer Handring 1. Casette stage Stage# Casette x2, Dummy casette x1 Wafer size 5-8 inch combination 2. Cooling station 3. Wafer handring robot Function Back surface adsorption Alignment of orientation flat Model GENMARK GENCOBOT Ⅳ 4. Elevator Wafre guide size 8 inch 5. Index table Susceptor Material: SiC Guide ring Material: Quarts Heat shield Material: SUS Susceptor support Material: SUS Rotation table <3> Process gas supply 1. AFC box MFC Aera FC-782/781 Filter Pall GLF6101/GLFPF8101 Regulator Tescom 44-3200 Air operated valve Fujikin MEGA-ONE 2. Bubbling unit 3. Heat pipe <4> Other supply 1. Air supply Aux N2, Vac. Gen N2 2. Colling water <5> Process reaction 1. Disversion head (D/H) 2. Reactor heater <6> Exhaust 1. Enclosure exhaust damper 2. Reactor exhaust damper 3. Reactor exhaust pipe unit 4. Manometer unit General exhaust Process exhaust 5. Drain tank system Tank capacity 10 little 6. Ozone treatment machine Method Catalyst system 7. Rotary brush Method Brush up + Vacuum <7> Sub system 1. Ozonizer Model Sumitomo Seimitsu SGN-04CUA 2. Liquid source supply system Spec. TEOS, TMOP, TEB 3. Chillor unit Model NESLAB CFT-25 <8> Conrol & Electric equipment 1. User interface Computor, Display, Key board 2. System controller VME controller Robot controller Rotation controller Temperature controller 3. Maintenance PC IBM compatible 4. Electric equipment <9> Safety 1. Gas detection unit Model Shincosmos Electric V880 2. UPS Model CLARY UPS1-1.25k-1G 3. Interlock 4. EMO x4
    OEMモデルの説明
    提供なし
    ドキュメント

    ドキュメントなし

    CANON

    APT-5800

    verified-listing-icon

    検証済み

    カテゴリ

    CVD
    最終検証: 60日以上前
    主なアイテムの詳細

    状態:

    Used


    稼働ステータス:

    不明


    製品ID:

    18315


    ウェーハサイズ:

    8"/200mm


    ヴィンテージ:

    不明

    Have Additional Questions?
    Logistics Support
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    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
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    同様のリスト
    すべて表示
    CANON APT-5800
    CANONAPT-5800CVD
    ヴィンテージ: 1996状態: 中古
    最終確認60日以上前

    CANON

    APT-5800

    verified-listing-icon

    検証済み

    カテゴリ

    CVD
    最終検証: 60日以上前
    listing-photo-KjoK9vIQjmw6eg9japcAhklerTLfKrSZXCjfXetQyVA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/0w1AOC-jGpzkjVqwmaqMBQHV6fzSFgHuv0bCW3MPMJY/KjoK9vIQjmw6eg9japcAhklerTLfKrSZXCjfXetQyVA/pY85fOtZnMDUyAm9Rcu5z1A5lQpM928-nf1hn5kfu88_20181005_063204_f
    listing-photo-KjoK9vIQjmw6eg9japcAhklerTLfKrSZXCjfXetQyVA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/0w1AOC-jGpzkjVqwmaqMBQHV6fzSFgHuv0bCW3MPMJY/KjoK9vIQjmw6eg9japcAhklerTLfKrSZXCjfXetQyVA/dqZJvQMy2rLZi4AiSiqUdQCUXijpwt5XyvAy6hSfbIg_20181005_063204_f
    listing-photo-KjoK9vIQjmw6eg9japcAhklerTLfKrSZXCjfXetQyVA-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/0w1AOC-jGpzkjVqwmaqMBQHV6fzSFgHuv0bCW3MPMJY/KjoK9vIQjmw6eg9japcAhklerTLfKrSZXCjfXetQyVA/obmIb0HDtCwYBXVvJZzFkhcfJuELoTdMGa5SW7k3UiM_20181005_063204_f
    主なアイテムの詳細

    状態:

    Used


    稼働ステータス:

    不明


    製品ID:

    18315


    ウェーハサイズ:

    8"/200mm


    ヴィンテージ:

    不明


    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    説明
    説明なし
    構成
    Process Atomosphere pressure CVD (BPSG) Wafer Size 200MM Wafer Shape Notch Wafer Cassette 8" Plastic Miraial SMIF Interface NO <1> Enclosure 1. Door 2.Load window 3.Clean unit Spec. ULPA Filter (0.1μm) <2> Wafer Handring 1. Casette stage Stage# Casette x2, Dummy casette x1 Wafer size 5-8 inch combination 2. Cooling station 3. Wafer handring robot Function Back surface adsorption Alignment of orientation flat Model GENMARK GENCOBOT Ⅳ 4. Elevator Wafre guide size 8 inch 5. Index table Susceptor Material: SiC Guide ring Material: Quarts Heat shield Material: SUS Susceptor support Material: SUS Rotation table <3> Process gas supply 1. AFC box MFC Aera FC-782/781 Filter Pall GLF6101/GLFPF8101 Regulator Tescom 44-3200 Air operated valve Fujikin MEGA-ONE 2. Bubbling unit 3. Heat pipe <4> Other supply 1. Air supply Aux N2, Vac. Gen N2 2. Colling water <5> Process reaction 1. Disversion head (D/H) 2. Reactor heater <6> Exhaust 1. Enclosure exhaust damper 2. Reactor exhaust damper 3. Reactor exhaust pipe unit 4. Manometer unit General exhaust Process exhaust 5. Drain tank system Tank capacity 10 little 6. Ozone treatment machine Method Catalyst system 7. Rotary brush Method Brush up + Vacuum <7> Sub system 1. Ozonizer Model Sumitomo Seimitsu SGN-04CUA 2. Liquid source supply system Spec. TEOS, TMOP, TEB 3. Chillor unit Model NESLAB CFT-25 <8> Conrol & Electric equipment 1. User interface Computor, Display, Key board 2. System controller VME controller Robot controller Rotation controller Temperature controller 3. Maintenance PC IBM compatible 4. Electric equipment <9> Safety 1. Gas detection unit Model Shincosmos Electric V880 2. UPS Model CLARY UPS1-1.25k-1G 3. Interlock 4. EMO x4
    OEMモデルの説明
    提供なし
    ドキュメント

    ドキュメントなし

    同様のリスト
    すべて表示
    CANON APT-5800
    CANON
    APT-5800
    CVDヴィンテージ: 1996状態: 中古最終検証: 60日以上前