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市場 > CVD > LAM RESEARCH / NOVELLUS > CONCEPT TWO "C2" SEQUEL

CONCEPT TWO "C2" SEQUEL

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CVD
概要(Overview)

The NOVELLUS CONCEPT TWO SEQUEL is a Reactors / MOCVD system that can produce wafer size of 8 inches. It was initially shipped in a single chamber version targeted at thin dielectric films used in volume 200mm IMD production applications.

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