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AccuFiz

カテゴリ
Defect Inspection
概要(Overview)

100 mm and 150 mm aperture models are provide industry-leading repeatability at 532 or 633 nm wavelengths. Maximum stability is essential for optical metrology, and these interferometers will operate successfully in any orientation or environment. The AccuFiz Fizeau’s compact, lightweight design is extremely rigid. No more recalibrating lateral dimensions when you zoom. Only AccuFiz includes Smart Zoom™ to ensure accurate lateral resolution over the entire 1X–10X zoom range.

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