概要（Overview）

The SEMVision G5 suite (G5, G5 HP, and G5 MAX) is the fifth generation of this revolutionary technology, providing the fastest, most precise, and smartest SEM system for 22nm and beyond. It offers operator-free automation, high-resolution imaging of true defects as small as 10nm, and comprehensive defect analysis. The system includes advanced features such as enhanced SEM column, charging suppression, imaging of bottom layer defects, high aspect ratio imaging, and automatic EDX module for elemental composition analysis. SEMVision G5 also provides in-line Wavelength Dispersive X-ray (WDX) material analysis. It sets new standards in defect visualization, classification, and cycle times.