概要（Overview）

The Scanning Acoustic Tomograph FineSAT uses ultrasonic waves to obtain images of internal voids, cracks, abrasion, etc., in materials such as semiconductor packages, electronic components, ceramics, metals, resins, in a non-destructive manner. FineSAT can also detect nanometer gaps that cannot be detected by X-ray equipment, infrared inspection equipment or optical microscope. FineSAT Ⅲ, the third-generation equipment of FineSAT, has the best performance for basic functions such as high resolution, and it is equipped with the most enhanced analysis software that provides high-speed auto measurement, transmission/reflection simultaneous measurement function and defect auto-detection function. Furthermore, it has improved usability, including batch storage of flaw-searched data, and can be used in a wide range of applications; from large amount inspection in the production process to research and development. Probe frequency (MHz)*1 = 5–140