eScan 1000
概要（Overview）
As the world's first multiple e-beam (multibeam) wafer inspection tool, the eScan 1000 delivers a massive leap forward in high-resolution wafer inspection. The eScan 1000 is up to 600% faster than previous e-beam wafer inspection tools, thanks to its multibeam technology, high-speed wafer stages and advanced computational algorithms.
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