概要（Overview）

The Leica INS 3000 is the new defect review and inspection station. The all stainless-steel system features a fully automatic integrated microscope, including UV and Confocal, and universal wafer handler. The design priorities of the INS 3000 are ergonomy, cleanliness, automation and user-friendliness.The characteristics of the system are 1 to 3 cassette front loading, including SMIF, and a newly developed Windows™ NT based graphical user interface.