概要（Overview）

SURFACE PARTICLE DETECTOR 0.1-5um Pentagon Technologies’ line of surface particle detectors are the standard in high technology industries for measuring and controlling surface contamination. Particles that accumulate on critical surfaces or products can reduce yield and reliability. To achieve optimal performance in particle sensitive manufacturing it is important to have a quantified metric for surface contamination. The QIII Surface Technology - QIII ST, uses an advanced, patented interface to re-suspend particulate from the surface and draw them through a particle detector.