説明
説明なし構成
Currently Configured for 300mm wafer size MFG Date: Dec 2012 EQUIPMENT DETAILS: Bump inspection system, 12" XPort, wafer scanner, ISO class 1 EFEM Outfitted with a dual arm robot XPort capable of handling: Standard wafer thicknesses (725um) down to 400 micron thickness for 12" wafers Standard features: Automated whole wafer handling Dual arm vacuum assist backside wafer handling End effector Integrated laminar clean air flow mini-environment (ULPA Filtration) Robot with integrated mapper Brooks Vision loadports, ATR9100, w/o Mapping Brooks Vision 12" load ports Capabilities: Local LCD user interface (30) Predefined fab specific indicators, labels, and buttons Customized indicator, labels, and buttons E84 OHT ready E99 carrier ID ready Class 3B laser at 830nm wavelength for 3D measurement. 3D sensor assy / computer, 5um / 8MHz, WS3880 Standard, 3D height verif wafer, 24um, 12" Ringlight assy, 3.5mm clearance Objective, 20x, long working dist, LMPLFL20XBD Dual OCR, Xport Ionizer assy, 44" Aerobar, XPort Clean air supply ionizer (AXi/XPort) Bar code reader, UPH and XPort, USB Computer, remote defect reviewOEMモデルの説明
提供なしドキュメント
ドキュメントなし
RUDOLPH / RVSI
WS-3880
検証済み
カテゴリ
Defect Inspection
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
19724
ウェーハサイズ：
不明
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
RUDOLPH / RVSI
WS-3880
検証済み
カテゴリ
Defect Inspection
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
19724
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
Currently Configured for 300mm wafer size MFG Date: Dec 2012 EQUIPMENT DETAILS: Bump inspection system, 12" XPort, wafer scanner, ISO class 1 EFEM Outfitted with a dual arm robot XPort capable of handling: Standard wafer thicknesses (725um) down to 400 micron thickness for 12" wafers Standard features: Automated whole wafer handling Dual arm vacuum assist backside wafer handling End effector Integrated laminar clean air flow mini-environment (ULPA Filtration) Robot with integrated mapper Brooks Vision loadports, ATR9100, w/o Mapping Brooks Vision 12" load ports Capabilities: Local LCD user interface (30) Predefined fab specific indicators, labels, and buttons Customized indicator, labels, and buttons E84 OHT ready E99 carrier ID ready Class 3B laser at 830nm wavelength for 3D measurement. 3D sensor assy / computer, 5um / 8MHz, WS3880 Standard, 3D height verif wafer, 24um, 12" Ringlight assy, 3.5mm clearance Objective, 20x, long working dist, LMPLFL20XBD Dual OCR, Xport Ionizer assy, 44" Aerobar, XPort Clean air supply ionizer (AXi/XPort) Bar code reader, UPH and XPort, USB Computer, remote defect reviewOEMモデルの説明
提供なしドキュメント
ドキュメントなし