概要（Overview）

The mechatronic systemtechnik gmbh´mWS series represents the latest generation of wafer sorters and sets new standards in safe handling of complex substrates (thin, ultra-thin or warped wafers). Consistent implementation of mechatronic systemtechnik gmb´s modular design concept guarantees full compatibility with the widest variety of wafer carriers, mechatronic systemtechnik gmbh sorters mWS can be configured to be a flexible solution for transfer, sorting splitting and merging operations. The mechatronic systemtechnik gmbh´mWS series of wafer sorting systems is capable to fully eliminate manual wafer handling in todays semiconductor fabrication.