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De-installed Equipment usage and function description 12-inch wafer plasma reaction chambers Missing parts No構成
Item Configuration Chamber DPSII RF System Bias generator V Source generator V bias match V HV module V Vacuum system Turbo pump V ISO valve V Pumping Line V Dual Gas feed system Gas line V ISO valve V EPD system Eye-D controller X Electric system AC distribute V DC power supply V Other Heater pad & ring V Source inner coil V Swap kits (9 pcs) VOEMモデルの説明
提供なしドキュメント
カテゴリ
Dry / Plasma Etch
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
109727
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
APPLIED MATERIALS (AMAT)
DPS II AE
カテゴリ
Dry / Plasma Etch
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
109727
ウェーハサイズ：
12"/300mm
ヴィンテージ：
2007
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available