APEX
概要（Overview）
Alcan (Canon): APEX single-chamber etch system. Helicon wave source licensed from Plasma and Materials Technology (MORI source), metal etch, poly etch.
現在の掲載品
1
サービス
検査、保証、鑑定、ロジスティクス
Alcan (Canon): APEX single-chamber etch system. Helicon wave source licensed from Plasma and Materials Technology (MORI source), metal etch, poly etch.
1
検査、保証、鑑定、ロジスティクス
