APS-3800
概要（Overview）
Alcan (Canon): APS-3800 three-chamber cluster tool. Helicon wave source licensed from Plasma and Materials Technology (MORI source), metal etch, poly etch, resist strip.
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6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
