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6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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2300 KIYO F

カテゴリ
Dry / Plasma Etch
概要(Overview)

The 2300 Kiyo F is part of Lam’s Kiyo product family, which delivers high-performance capabilities for conductor etching in semiconductor devices. Conductor etch helps shape the electrically active materials used in the parts of a semiconductor device, and even a slight variation in these miniature structures can impact device performance. The Kiyo F series offers superior uniformity and repeatability, high productivity with low defectivity on multi-film stacks, improved critical dimension uniformity, atomic-scale variability control with production-worthy throughput, and upgradability for low cost of ownership over several device generations.

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