OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

Configuration_Plasmalab 100 (ICP380).pdf

Configuration_Plasmalab 100 (PECVD).pdf

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There are 3 main problems with the system:
1) Neither AMU is in working condition
2) There is an internal leak in the system, which we believe is coming from CDA and/or related to the slit valve.
3) The backing pumps have failed repeated, likely related to vacuum leak
 
The status of parts on the tool:
1) ICP AMU – Installed, not working
2) RIE AMU – Not installed, but we have the original unit. The original unit does not work.
3) ICP Power Supply – Not installed. Unsure if working.
4) Endpoint detection system – Not installed. Unsure if working.
5) Backing pump – None, two prior pumps have failed
6) All other parts of the tool are present and installed. Besides the vacuum leak, all other parts were working at last shutdown.

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3 main modules (Left Chamber, Right Chamber and LoadLock)

+ Accessories (3 Mechanical Oil Pumps, and one Chiller, Computer and accessories)

 

plasmalab_100.pdf

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PLASMALAB 100 DRY / PLASMA ETCH

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OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

OXFORD

PLASMALAB 100 DRY / PLASMA ETCH

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OXFORD

PLASMALAB 100 DRY / PLASMA ETCH