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STS MESC MULTIPLEX ICP
  • STS MESC MULTIPLEX ICP
  • STS MESC MULTIPLEX ICP
説明
説明なし
構成
Advanced Silicon Etcher (ASE) Version 2 Deep High-Aspect Ration Etcher (DRIE) Silicon etcher Load-lock and chucks for 100mm and 150mm Electrostatic clamping chuck upgrade for SOI wafers and the Xenon Difluoride (XeF) module for isotropic etching.
OEMモデルの説明
Deep Reactive Ion Etching (DRIE)
ドキュメント

ドキュメントなし

カテゴリ
Dry / Plasma Etch

最終検証: 60日以上前

主なアイテムの詳細

状態:

Used


稼働ステータス:

不明


製品ID:

97582


ウェーハサイズ:

4"/100mm, 6"/150mm


ヴィンテージ:

2003


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

STS

MESC MULTIPLEX ICP

verified-listing-icon
検証済み
カテゴリ
Dry / Plasma Etch
最終検証: 60日以上前
listing-photo-3af1baf2de75445cbf4560a85c6f70fa-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/75267/3af1baf2de75445cbf4560a85c6f70fa/08b21a4bbea34c3cb9b7d836aa2dede9_facd72c0b8c44e77b35fd57e6138a634_mw.jpeg
listing-photo-3af1baf2de75445cbf4560a85c6f70fa-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/75267/3af1baf2de75445cbf4560a85c6f70fa/780f9c0b9f484da4a0a366330ab49763_087ce38c29894361968dd512abebe405_mw.jpeg
主なアイテムの詳細

状態:

Used


稼働ステータス:

不明


製品ID:

97582


ウェーハサイズ:

4"/100mm, 6"/150mm


ヴィンテージ:

2003


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし
構成
Advanced Silicon Etcher (ASE) Version 2 Deep High-Aspect Ration Etcher (DRIE) Silicon etcher Load-lock and chucks for 100mm and 150mm Electrostatic clamping chuck upgrade for SOI wafers and the Xenon Difluoride (XeF) module for isotropic etching.
OEMモデルの説明
Deep Reactive Ion Etching (DRIE)
ドキュメント

ドキュメントなし