概要（Overview）

-980ACS series etch system. Customers will use the system for high-volume fabrication of storage devices destined for mainstream consumer and industrial applications. -Order included a new tool and two ACS upgrades to existing 980 production tools and it is part of an overall plan to add production capacity and enhance factory automation support while maintaining compatibility with existing production processes. -Latest in a series of plasma etch systems produced by Tegal.