649A
カテゴリ
Electronic Test概要（Overview）
The MKS Type 649 is a single instrument that provides both pressure control and flow metering. The Type 649 replaces multiple component subassemblies, for example pressure controllers with separate flow meters used in applications such as backside wafer cooling systems (BWCS). The compact Type 649 design allows for significant reduction in BWCS size and complexity.
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