RE-3500
カテゴリ
Elipsometry概要(Overview)
Wafer size 125mm ~ 300mm Measurement Equipment to Support Electronic Devices for loT. With the RE-3500, both film thickness and optical constants can be measured simultaneously. This unit is suitable for not only controlling film thickness, but also for processes in which film quality is crucial, as well as for developing new thin film materials and in the film creation process.
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