SENDURO 200
カテゴリ
Elipsometry概要(Overview)
Ellipsometer for routine applications Very fast measurement of films between a few angstrom and more than 50µm thickness. - Cassette to cassette load for 200 mm and 300 mm wafers - Spectral range 290 – 850 nm - Recipe based measurements - Proprietary ellipsometer software SpectraRay/3
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