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LITMAS RPS
概要（Overview）
The Litmas RPS is a remote plasma source that delivers high concentrations of reactive gas species to enable effective abatement of environmentally harmful PFC gases. Its small footprint, high performance, ease of use, and low cost of ownership set it apart from competitive abatement solutions that require high upfront investment and high operating cost.
現在の掲載品
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検査、保証、鑑定、ロジスティクス
