概要（Overview）

The new and innovative Axus Technology Aquarius™ Wafer Cleaner provides improvements in all aspects of 100mm, 150mm, and 200mm wafer cleaning, including defectivity and throughput. Aquarius™ enhances the efficiency of the wafer cleaning process with the capability to run two different wafer sizes simultaneously. Through great engineering strides that has impacted the way wafer cleaning equipment progresses into the future, Axus Technology is proud to bring the best wafer scrubber to market.