説明
manual load table. 2 chemical cabinets 4 canisters.構成
構成なしOEMモデルの説明
The ZETA™ 200 is a fully automated system that can transfer wafer batches from incoming SMIF pods to the process chamber in a full mini-environment, ensuring minimal added particles. The system features the unique, high-temperature ViPR™ process for high-performance and low-cost stripping of resist, silicide, and other films. Batch spray processing provides a more economical alternative to single wafer resist strip solutions. The ZETA™ 200 can be configured with up to 8 different chemical inputs to a single, closed chamber, providing the flexibility to blend chemicals or change mix ratios and temperatures within a recipe. This system is also available in 300mm as the ZETA™ 300.ドキュメント
ドキュメントなし
TEL / FSI
ZETA 200
検証済み
カテゴリ
Etch/Asher
最終検証: 18日前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
25335
ウェーハサイズ:
不明
ヴィンテージ:
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示同様のリストが見つかりません
TEL / FSI
ZETA 200
カテゴリ
Etch/Asher
最終検証: 18日前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
25335
ウェーハサイズ:
不明
ヴィンテージ:
不明
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
manual load table. 2 chemical cabinets 4 canisters.構成
構成なしOEMモデルの説明
The ZETA™ 200 is a fully automated system that can transfer wafer batches from incoming SMIF pods to the process chamber in a full mini-environment, ensuring minimal added particles. The system features the unique, high-temperature ViPR™ process for high-performance and low-cost stripping of resist, silicide, and other films. Batch spray processing provides a more economical alternative to single wafer resist strip solutions. The ZETA™ 200 can be configured with up to 8 different chemical inputs to a single, closed chamber, providing the flexibility to blend chemicals or change mix ratios and temperatures within a recipe. This system is also available in 300mm as the ZETA™ 300.ドキュメント
ドキュメントなし
同様のリスト
すべて表示同様のリストが見つかりません