Compact Bench-Top Plasma Treatment System

The AP-600™ plasma system delivers exceptionally uniform plasma cleaning and treatment for semiconductor, microelectronic packaging and assembly, and medical device manufacturing.

The AP-600 system provides:
• Durable high-quality aluminum construction and fixtures
• Up to 7 removable and adjustable powered or grounded shelves for a wide range of piece-parts, components, and part carriers including magazines, trays, and boats
• A compact, self-contained system chassis that houses the plasma chamber, control electronics, 13.56 MHz RF generator, and the automatic matching network (only the vacuum pump is external to the system)
• An intuitive touch-screen control panel for real-time process monitoring
• Convenient facility hook-ups for periodic calibration requirements used in validation processes
• Support for a wide range of process gases including argon, oxygen, helium, and fluorinated gases
• Maintenance access through an interlocked door or removable panels
• Two standard electronic mass flow controllers for optimal gas control, with an option for two additional controllers (4 maximum)

Nordson March AP-600.pdf

Nordson MARCH was formed through the merging of March Instruments of Concord, California, USA and Advanced Plasma Systems (APS) of St. Petersburg, Florida, USA. The company was acquired in 1999 by Nordson Corporation and referred to as March Plasma Systems until renamed Nordson MARCH in 2009.

https://www.nordson.com/en/divisions/march

NORDSON / MARCH

Plasma System

Plasma cleaning and treatment for semiconductor, microelectronic packaging and assembly, and medical device manufacturing.

• Plasma cleaning
• Surface activation
• Adhesion improvement

AP-600

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NORDSON / MARCH

AP-600

Ashers / Plasma Cleaner

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AP-600

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