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EcoCoat

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Etch/Asher
概要(Overview)

The YES EcoCoat® system provides excellent control of the process environment by combining the latest advances in chemical vapor deposition technologies with YES plasma cleaning. This minimizes chemical usage while achieving a consistent substrate surface. It also creates the flexibility to use a wide range of organosilanes in small sample sizes to help significantly improve the cost-effectiveness for research applications requiring precise surface modification. When ready to scale to high-volume production, transition seamlessly up to the high-volume production UltraCoat system.

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