CENTURA 5200
カテゴリ
Dry Etch概要(Overview)
The AMAT / APPLIED MATERIALS Centura 5200 is an Etchers & Ashers system. The centura 5200 can be used with 8” wafer size and oxidation etchers size is also 8”. The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.
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検査、保証、鑑定、ロジスティクス