AUTOETCH 480
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Plasma Etch概要（Overview）
The AutoEtch 480 system is a plasma etcher that offers a high level of automation through its Recipe™ Programming Module. This solid-state module is compact and easy to use, allowing for automatic entry of all process parameters, including flow rates, pressure, RF power, substrate temperature, and electrode spacing. This makes programming the AutoEtch 480 quick and simple.
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